Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +3 more | 2018-10-09 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2018-08-14 |
| 9911621 | Method for processing target object | Toshikatsu TOBANA, Soichiro Okada | 2018-03-06 |