Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10069443 | Dechuck control method and plasma processing apparatus | Shigeru Senzaki, Shunichi Mikami | 2018-09-04 |
| 9911621 | Method for processing target object | Gen You, Soichiro Okada | 2018-03-06 |