SM

Shunichi Mikami

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
📍 Rifu, JP: #94 of 272 inventorsTop 35%
Overall (2018): #239,812 of 503,207Top 50%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10069443 Dechuck control method and plasma processing apparatus Shigeru Senzaki, Toshikatsu TOBANA 2018-09-04