Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10155246 | Adjusment method of chemical liquid supply device, non-transitory storage medium, and chemical liquid supply device | Shinichi MIZUSHINO | 2018-12-18 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Kazuyuki Mitsuoka, Gen You +3 more | 2018-10-09 |
| 10014186 | Substrate treatment method and substrate treatment apparatus | Yuya Akeboshi, Hisashi Okuchi, Yasuhito Yoshimizu, Hiroaki Yamada | 2018-07-03 |
| 9991111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Shinsuke Kimura, Hisashi Okuchi | 2018-06-05 |
| 9859111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Shinsuke Kimura, Hisashi Okuchi | 2018-01-02 |