Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032658 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yoshihiro Ogawa | 2018-07-24 |
| 9991111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Hisashi Okuchi, Hiroshi Tomita | 2018-06-05 |
| 9859111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Hisashi Okuchi, Hiroshi Tomita | 2018-01-02 |