Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Shinsuke Kimura, Hisashi Okuchi, Hiroshi Tomita | 2018-06-05 |
| 9859111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Shinsuke Kimura, Hisashi Okuchi, Hiroshi Tomita | 2018-01-02 |