Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10014186 | Substrate treatment method and substrate treatment apparatus | Hiroshi Tomita, Hisashi Okuchi, Yasuhito Yoshimizu, Hiroaki Yamada | 2018-07-03 |
| 10008400 | Substrate processing device and method of manufacturing semiconductor device | Shinsuke Muraki, Hiroaki Yamada, Katsuhiro Sato | 2018-06-26 |
| 9991159 | Semiconductor device manufacture method | Fuyuma Ito, Yasuhito Yoshimizu, Hisashi Okuchi, Masayuki Kitamura | 2018-06-05 |