Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147619 | Substrate treatment apparatus, substrate treatment method, and etchant | Kaori Deura, Yoshinori Kitamura, Takahiro Terada, Yoshihiro Ogawa, Yuji Hashimoto +3 more | 2018-12-04 |
| 10124352 | Electrostatic coating device, power source device for electrostatic coating device and electrostatic coating method | Tsutomu Ueno | 2018-11-13 |
| 10109508 | Substrate processing device and method of manufacturing semiconductor device | Hiroaki ASHIDATE | 2018-10-23 |
| 10096486 | Substrate processing apparatus, substrate processing method and substrate processing liquid | Shinsuke Muraki, Hiroaki Yamada | 2018-10-09 |
| 10008400 | Substrate processing device and method of manufacturing semiconductor device | Shinsuke Muraki, Hiroaki Yamada, Yuya Akeboshi | 2018-06-26 |
| 9934958 | Substrate treatment apparatus and substrate treatment method | Junichi Igarashi | 2018-04-03 |