Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096486 | Substrate processing apparatus, substrate processing method and substrate processing liquid | Katsuhiro Sato, Hiroaki Yamada | 2018-10-09 |
| 10008400 | Substrate processing device and method of manufacturing semiconductor device | Hiroaki Yamada, Yuya Akeboshi, Katsuhiro Sato | 2018-06-26 |