Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9922849 | Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof | Yasuyuki Ido, Naoki Shindo, Takehiko Orii, Yosuke Hachiya, Kotaro Ooishi +2 more | 2018-03-20 |
| 9865452 | Substrate processing method and substrate processing apparatus | Kotaro Oishi, Kouzou Tachibana, Hideaki Udou | 2018-01-09 |