Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026629 | Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program | Junichi Kitano, Teruomi Minami | 2018-07-17 |
| 9953840 | Substrate processing method and substrate processing system | Hiroshi Marumoto, Hisashi Kawano, Hiromi Kiyose, Kazuyuki Mitsuoka | 2018-04-24 |