Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153182 | Substrate processing apparatus | Noboru Higashi, Satoru Hiraki, Hideaki Sato, Hiroshi Komiya | 2018-12-11 |
| 10037901 | Substrate liquid treatment apparatus, method of cleaning substrate liquid treatment apparatus and non-transitory storage medium | Kazuya Koyama, Katsufumi MATSUKI, Shuhei Takahashi, Hideki Nishimura, Takashi Uno +1 more | 2018-07-31 |
| 9953840 | Substrate processing method and substrate processing system | Hiroshi Marumoto, Hisashi Kawano, Mitsunori Nakamori, Kazuyuki Mitsuoka | 2018-04-24 |