Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162371 | Substrate liquid processing apparatus and substrate liquid processing method | Yasuhiro Takaki, Chikara Nobukuni, Keigo Satake, Atsushi Anamoto | 2018-12-25 |
| 10153182 | Substrate processing apparatus | Noboru Higashi, Satoru Hiraki, Hiromi Kiyose, Hideaki Sato | 2018-12-11 |