Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153182 | Substrate processing apparatus | Noboru Higashi, Satoru Hiraki, Hiromi Kiyose, Hiroshi Komiya | 2018-12-11 |
| 10139883 | Reset signal generation circuit | — | 2018-11-27 |
| 10096497 | Substrate liquid processing apparatus, substrate liquid processing method and storage medium | — | 2018-10-09 |
| 10032642 | Substrate liquid processing apparatus | Takashi Nagai, Hiromi Hara | 2018-07-24 |
| 9928370 | Communication device, communication method, computer program product, and communication system | Yoshimichi Tanizawa, Ririka Takahashi, Shinichi Kawamura, Shinya Murai | 2018-03-27 |
| 9887092 | Etching method, etching apparatus, and storage medium | Takahiro Furukawa, Yusuke Futamata, Hiromi Hara, Takahiro Kawazu, Toshiyuki Shiokawa +1 more | 2018-02-06 |
| 9881799 | Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium | Takami Satoh | 2018-01-30 |
| 9874204 | Swash plate compressor | Toshiharu Tabei, Tetsuya Morijiri, Takeo Yasu | 2018-01-23 |
| 9859109 | Substrate processing apparatus, substrate processing method and computer-readable medium storing program | — | 2018-01-02 |