Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032642 | Substrate liquid processing apparatus | Hideaki Sato, Takashi Nagai | 2018-07-24 |
| 9887092 | Etching method, etching apparatus, and storage medium | Takahiro Furukawa, Yusuke Futamata, Hideaki Sato, Takahiro Kawazu, Toshiyuki Shiokawa +1 more | 2018-02-06 |