Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10067514 | Substrate processing apparatus and liquid mixing method | Yasuo Kiyohara, Ikuo Sunaka, Koji Tanaka, Kazuyoshi Mizumoto, Takashi Uno +3 more | 2018-09-04 |
| 9887092 | Etching method, etching apparatus, and storage medium | Takahiro Furukawa, Yusuke Futamata, Hideaki Sato, Hiromi Hara, Takahiro Kawazu +1 more | 2018-02-06 |
| 9881799 | Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium | Hideaki Sato | 2018-01-30 |