Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128138 | Substrate transfer method and storage medium | Katsuhiro Morikawa, Seiji Nakano, Kazunori Kuratomi, Toshio Shimazu | 2018-11-13 |
| 10067514 | Substrate processing apparatus and liquid mixing method | Yasuo Kiyohara, Koji Tanaka, Takami Satoh, Kazuyoshi Mizumoto, Takashi Uno +3 more | 2018-09-04 |