Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128138 | Substrate transfer method and storage medium | Ikuo Sunaka, Seiji Nakano, Kazunori Kuratomi, Toshio Shimazu | 2018-11-13 |
| 10042356 | Substrate processing apparatus, method for correcting positional displacement, and storage medium | Naruaki Iida | 2018-08-07 |