Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953840 | Substrate processing method and substrate processing system | Hisashi Kawano, Hiromi Kiyose, Mitsunori Nakamori, Kazuyuki Mitsuoka | 2018-04-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953840 | Substrate processing method and substrate processing system | Hisashi Kawano, Hiromi Kiyose, Mitsunori Nakamori, Kazuyuki Mitsuoka | 2018-04-24 |