Issued Patents 2018
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145010 | Multi-station plasma reactor with RF balancing | Sunil Kapoor, Adrien LaVoie, Yaswanth Rangineni | 2018-12-04 |
| 10143993 | Radical generator and method for generating ammonia radicals | — | 2018-12-04 |
| 10139132 | Apparatus for thermal control of tubing assembly and associated methods | — | 2018-11-27 |
| 10121689 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2018-11-06 |
| 10109517 | Rotational indexer with additional rotational axes | Richard M. Blank | 2018-10-23 |
| 10100407 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2018-10-16 |
| 10044338 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni | 2018-08-07 |
| 10043636 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Vince Burkhart | 2018-08-07 |
| 10020220 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2018-07-10 |
| 9997422 | Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability | Ishtak Karim, Yukinori Sakiyama, Yaswanth Rangineni, Edward Augustyniak, Douglas Keil +2 more | 2018-06-12 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Hu Kang, Purushottam Kumar, Chloe Baldasseroni, Heather Landis +11 more | 2018-05-15 |
| 9960068 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2018-05-01 |
| 9954508 | Multiple-output radiofrequency matching module and associated methods | Sunil Kapoor, Bradford J. Lyndaker | 2018-04-24 |
| 9941113 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Ishtak Karim, Yaswanth Rangineni, Adrien LaVoie, Yukinori Sakiyama +2 more | 2018-04-10 |
| 9920844 | Valve manifold deadleg elimination via reentrant flow path | Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Chloe Baldasseroni, Ted Minshall +1 more | 2018-03-20 |
| 9916995 | Compact substrate processing tool with multi-station processing and pre-processing and/or post-processing stations | — | 2018-03-13 |
| 9892956 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2018-02-13 |
| 9875891 | Selective inhibition in atomic layer deposition of silicon-containing films | Jon Henri, Dennis M. Hausmann, Bart J. van Schravendijk, Shane Tang | 2018-01-23 |