Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128160 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Yaswanth Rangineni, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2018-11-13 |
| 10094018 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Jun Qian, Hu Kang, Fung Suong Ou | 2018-10-09 |
| 10074543 | High dry etch rate materials for semiconductor patterning applications | Arpan Mahorowala, Purushottam Kumar, Shankar Swaminathan, Adrien LaVoie | 2018-09-11 |
| 10062563 | Selective atomic layer deposition with post-dose treatment | Purushottam Kumar, Adrien LaVoie, Jun Qian, Frank L. Pasquale, Bart J. van Schravendijk | 2018-08-28 |
| 10037884 | Selective atomic layer deposition for gapfill using sacrificial underlayer | Fung Suong Ou, Purushottam Kumar, Adrien LaVoie, Jun Qian | 2018-07-31 |
| 9997422 | Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability | Yukinori Sakiyama, Yaswanth Rangineni, Edward Augustyniak, Douglas Keil, Ramesh Chandrasekharan +2 more | 2018-06-12 |
| 9941113 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Yaswanth Rangineni, Adrien LaVoie, Yukinori Sakiyama, Edward Augustyniak +2 more | 2018-04-10 |
| 9870917 | Variable temperature hardware and methods for reduction of wafer backside deposition | Hu Kang, Purushottam Kumar, Jun Qian, Ramesh Chandrasekharan, Adrien LaVoie | 2018-01-16 |