Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153139 | Multiple electrode substrate support assembly and phase control system | Yang Yang, Kartik Ramaswamy, Steven Lane, Lawrence Wong, Shahid Rauf +2 more | 2018-12-11 |
| 10131994 | Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci, Douglas A. Buchberger, Jr. +5 more | 2018-11-20 |
| 10096494 | Substrate support with symmetrical feed structure | Xing Lin, Douglas A. Buchberger, Jr., Xiaoping Zhou, Anchel Sheyner | 2018-10-09 |
| 10017857 | Method and apparatus for controlling plasma near the edge of a substrate | Yang Yang, Kartik Ramaswamy, Steven Lane, Lawrence Wong | 2018-07-10 |
| 10010912 | Particle reduction via throttle gate valve purge | Jared Ahmad Lee, Dmitry Lubomirsky, Martin Jeff Salinas, Tom K. Cho, Eric A. Englhardt +1 more | 2018-07-03 |
| 9947559 | Thermal management of edge ring in semiconductor processing | Aniruddha Pal, Martin Jeffrey Salinas, Dmitry Lubomirsky, Imad Yousif | 2018-04-17 |
| 9896769 | Inductively coupled plasma source with multiple dielectric windows and window-supporting structure | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci, Douglas A. Buchberger, Jr. +5 more | 2018-02-20 |