| 10121676 |
Interconnects fabricated by hydrofluorocarbon gas-assisted plasma etch |
Robert L. Bruce, Eric A. Joseph, Takefumi Suzuki |
2018-11-06 |
| 10049974 |
Metal silicate spacers for fully aligned vias |
Benjamin D. Briggs, Jessica Dechene, Elbert E. Huang |
2018-08-14 |
| 10020254 |
Integration of super via structure in BEOL |
Ruqiang Bao, Yann Mignot, Hosadurga Shobha, Junli Wang, Yongan Xu |
2018-07-10 |
| 10020255 |
Integration of super via structure in BEOL |
Ruqiang Bao, Yann Mignot, Hosadurga Shobha, Junli Wang, Yongan Xu |
2018-07-10 |
| 9953865 |
Structure and method to improve FAV RIE process margin and electromigration |
Benjamin D. Briggs, Theodorus E. Standaert |
2018-04-24 |
| 9934984 |
Hydrofluorocarbon gas-assisted plasma etch for interconnect fabrication |
Robert L. Bruce, Eric A. Joseph, Takefumi Suzuki |
2018-04-03 |
| 9905513 |
Selective blocking boundary placement for circuit locations requiring electromigration short-length |
Benjamin D. Briggs, Elbert E. Huang, Christopher J. Penny |
2018-02-27 |
