Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128185 | Hybrid subtractive etch/metal fill process for fabricating interconnects | Robert L. Bruce, Gregory M. Fritz, Hiroyuki Miyazoe | 2018-11-13 |
| 10121676 | Interconnects fabricated by hydrofluorocarbon gas-assisted plasma etch | Robert L. Bruce, Joe Lee, Takefumi Suzuki | 2018-11-06 |
| 9934984 | Hydrofluorocarbon gas-assisted plasma etch for interconnect fabrication | Robert L. Bruce, Joe Lee, Takefumi Suzuki | 2018-04-03 |
| 9911648 | Interconnects based on subtractive etching of silver | Brett C. Baker-O'Neal, Hiroyuki Miyazoe | 2018-03-06 |