Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10143074 | Filter and target supply apparatus | Tomohide Ichinose, Fumio Iwamoto, Yutaka Shiraishi, Hideo Hoshino | 2018-11-27 |
| 10136509 | Target supply device, processing device and processing method thefefor | Yutaka Shiraishi, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki | 2018-11-20 |
| 10117317 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-10-30 |
| 10028365 | Chamber device, target generation method, and extreme ultraviolet light generation system | Takanobu Ishihara, Takashi Saito, Yutaka Shiraishi | 2018-07-17 |
| 10028366 | Extreme UV light generation device and target recovery apparatus | Fumio Iwamoto, Kazukiyo Kamikanna | 2018-07-17 |
| 9894744 | Extreme ultraviolet light generation apparatus | Fumio Iwamoto, Yutaka Shiraishi, Takuya Ishii | 2018-02-13 |
| 9883574 | Target producing apparatus | Fumio Iwamoto, Takashi Saito, Osamu Wakabayashi | 2018-01-30 |
| 9877378 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-01-23 |
| 9860967 | Target supply apparatus, extreme ultraviolet light generating apparatus, and target supply method | Hirokazu HOSODA | 2018-01-02 |