Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141186 | Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system | Hirokazu HOSODA, Takayuki Yabu | 2018-11-27 |
| 10143074 | Filter and target supply apparatus | Tomohide Ichinose, Fumio Iwamoto, Yutaka Shiraishi, Tsukasa HORI | 2018-11-27 |
| 10122145 | Laser apparatus and extreme ultraviolet light generation system | Yoshiaki Kurosawa | 2018-11-06 |