Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141186 | Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system | Hirokazu HOSODA, Hideo Hoshino | 2018-11-27 |
| 10102938 | Extreme ultraviolet light generating apparatus | Tamotsu Abe, Kenichi Miyao, Tooru Abe | 2018-10-16 |
| 10085334 | Extreme ultraviolet light generating system | — | 2018-09-25 |
| 10054861 | Extreme ultraviolet light generating apparatus and method for generating extreme ultraviolet light | — | 2018-08-21 |
| 10057972 | Extreme ultraviolet light generation system and method of generating extreme ultraviolet light | Yoshifumi Ueno, Hirokazu HOSODA | 2018-08-21 |
| 9949354 | Extreme UV light generation apparatus and method | Takashi Saito, Fumio Iwamoto, Osamu Wakabayashi | 2018-04-17 |