Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10143074 | Filter and target supply apparatus | Tomohide Ichinose, Yutaka Shiraishi, Tsukasa HORI, Hideo Hoshino | 2018-11-27 |
| 10028366 | Extreme UV light generation device and target recovery apparatus | Tsukasa HORI, Kazukiyo Kamikanna | 2018-07-17 |
| 10009991 | Target supply apparatus and EUV light generating apparatus | Toshihiro Nishisaka, Yoshiaki Kato | 2018-06-26 |
| 9949354 | Extreme UV light generation apparatus and method | Takashi Saito, Osamu Wakabayashi, Takayuki Yabu | 2018-04-17 |
| 9894744 | Extreme ultraviolet light generation apparatus | Yutaka Shiraishi, Tsukasa HORI, Takuya Ishii | 2018-02-13 |
| 9883574 | Target producing apparatus | Takashi Saito, Tsukasa HORI, Osamu Wakabayashi | 2018-01-30 |