Issued Patents 2018
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10164396 | Laser unit and non-transitory computer-readable storage medium | Akihiko KUROSU, Takashi Matsunaga, Hiroyuki Masuda, Hiroaki TSUSHIMA, Masanori YASHIRO +1 more | 2018-12-25 |
| 10151640 | Light beam measurement device, laser apparatus, and light beam separator | Masato Moriya, Yoshinobu WATABE | 2018-12-11 |
| 10117317 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Hakaru Mizoguchi | 2018-10-30 |
| 10103509 | Excimer laser device | Kouji Kakizaki, Akira SUWA, Hiroshi Umeda | 2018-10-16 |
| 10092979 | Laser irradiation apparatus | Akiyoshi Suzuki, Minoru Taniyama | 2018-10-09 |
| 10074956 | System and method for generating extreme ultraviolet light, and laser apparatus | Tatsuya Yanagida | 2018-09-11 |
| 10074958 | Laser system | Masaki Arakawa, Kouji Kakizaki | 2018-09-11 |
| 10050408 | Laser system | Akiyoshi Suzuki, Masaki Arakawa, Koji ASHIKAWA, Yasuhiro KAMBA | 2018-08-14 |
| 10038295 | Gas laser apparatus | Natsushi Suzuki, Hiroaki TSUSHIMA, Masanori YASHIRO | 2018-07-31 |
| 10027084 | Alignment system and extreme ultraviolet light generation system | Masato Moriya | 2018-07-17 |
| 9991665 | Laser system | Hiroshi Umeda, Takeshi Asayama | 2018-06-05 |
| 9986629 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Tamotsu Abe, Tatsuya Yanagida | 2018-05-29 |
| 9980360 | Extreme ultraviolet light generation system | Tatsuya Yanagida | 2018-05-22 |
| 9966721 | Laser system | Kouji Kakizaki, Masaki Arakawa, Kouji Ashikawa, Yasuhiro KAMBA, Akiyoshi Suzuki | 2018-05-08 |
| 9954340 | Excimer laser apparatus and excimer laser system | Tooru Abe, Takeshi Ohta, Hiroaki TSUSHIMA | 2018-04-24 |
| 9954339 | Laser unit and extreme ultraviolet light generating system | Takashi Suganuma, Hakaru Mizoguchi | 2018-04-24 |
| 9949354 | Extreme UV light generation apparatus and method | Takashi Saito, Fumio Iwamoto, Takayuki Yabu | 2018-04-17 |
| 9929529 | Solid-state laser system and laser apparatus used for exposure apparatus | Takashi Onose | 2018-03-27 |
| 9891012 | Device for controlling temperature of cooling water | Yasufumi Kawasuji, Masazumi Komori | 2018-02-13 |
| 9882334 | Mirror device | Toru Suzuki, Yukio Watanabe, Miwa Igarashi | 2018-01-30 |
| 9883574 | Target producing apparatus | Fumio Iwamoto, Takashi Saito, Tsukasa HORI | 2018-01-30 |
| 9877378 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Hakaru Mizoguchi | 2018-01-23 |