Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9894743 | Extreme ultraviolet light generation apparatus | Miwa Igarashi, Masato Moriya, Hiroaki Nakarai | 2018-02-13 |
| 9882334 | Mirror device | Toru Suzuki, Miwa Igarashi, Osamu Wakabayashi | 2018-01-30 |