Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151640 | Light beam measurement device, laser apparatus, and light beam separator | Osamu Wakabayashi, Yoshinobu WATABE | 2018-12-11 |
| 10027084 | Alignment system and extreme ultraviolet light generation system | Osamu Wakabayashi | 2018-07-17 |
| 9894743 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Miwa Igarashi, Hiroaki Nakarai | 2018-02-13 |
| 9882343 | Narrow band laser apparatus | Takeshi Ohta, Keisuke Ishida, Takashi KUSAMA | 2018-01-30 |