Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126657 | Extreme ultraviolet light generating apparatus | Hirokazu HOSODA | 2018-11-13 |
| 10102938 | Extreme ultraviolet light generating apparatus | Takayuki Yabu, Kenichi Miyao, Tooru Abe | 2018-10-16 |
| 9986629 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Osamu Wakabayashi, Tatsuya Yanagida | 2018-05-29 |
| 9942973 | Extreme ultraviolet light generation apparatus | Yoshifumi Ueno, Hirokazu HOSODA, Takashi Saito | 2018-04-10 |
| 9872372 | Extreme ultraviolet light generation device | Atsushi Ueda, Shinji Nagai, Yoshifumi Ueno | 2018-01-16 |