Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10111312 | Extreme ultraviolet light generation device | Toru Suzuki, Kotaro Miyashita, Takuya Ishii | 2018-10-23 |
| 10057972 | Extreme ultraviolet light generation system and method of generating extreme ultraviolet light | Hirokazu HOSODA, Takayuki Yabu | 2018-08-21 |
| 9957421 | Sealing tape, phosphor sheet, lighting device, liquid-crystal display, method for manufacturing phosphor sheet, and sealing method | Yasushi Ito, Tomomitsu Hori, Teruo HIYAMA, Akihiro Yamazaki | 2018-05-01 |
| 9942973 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Hirokazu HOSODA, Takashi Saito | 2018-04-10 |
| 9888555 | Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser system | Masahiko Ando, Toru Suzuki | 2018-02-06 |
| 9872372 | Extreme ultraviolet light generation device | Atsushi Ueda, Shinji Nagai, Tamotsu Abe | 2018-01-16 |