Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10136510 | Extreme ultraviolet light generation device | Georg Soumagne, Toshihiro Nishisaka | 2018-11-20 |
| 10001706 | Extreme ultraviolet light generation apparatus and method of designing the same | Atsushi Ueda | 2018-06-19 |
| 9872372 | Extreme ultraviolet light generation device | Atsushi Ueda, Yoshifumi Ueno, Tamotsu Abe | 2018-01-16 |