Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10136510 | Extreme ultraviolet light generation device | Shinji Nagai, Georg Soumagne | 2018-11-20 |
| 10009991 | Target supply apparatus and EUV light generating apparatus | Yoshiaki Kato, Fumio Iwamoto | 2018-06-26 |