Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141186 | Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system | Takayuki Yabu, Hideo Hoshino | 2018-11-27 |
| 10126657 | Extreme ultraviolet light generating apparatus | Tamotsu Abe | 2018-11-13 |
| 10057972 | Extreme ultraviolet light generation system and method of generating extreme ultraviolet light | Yoshifumi Ueno, Takayuki Yabu | 2018-08-21 |
| 9942973 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Yoshifumi Ueno, Takashi Saito | 2018-04-10 |
| 9860967 | Target supply apparatus, extreme ultraviolet light generating apparatus, and target supply method | Tsukasa HORI | 2018-01-02 |