Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10117317 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-10-30 |
| 10074956 | System and method for generating extreme ultraviolet light, and laser apparatus | Osamu Wakabayashi | 2018-09-11 |
| 9986629 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Tamotsu Abe, Osamu Wakabayashi | 2018-05-29 |
| 9980360 | Extreme ultraviolet light generation system | Osamu Wakabayashi | 2018-05-22 |
| 9877378 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-01-23 |