Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10117317 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-10-30 |
| 10103509 | Excimer laser device | Akira SUWA, Osamu Wakabayashi, Hiroshi Umeda | 2018-10-16 |
| 10096966 | Gas laser device and condenser | Akira SUWA, Hiroaki TSUSHIMA, Tomoyuki OHKUBO, Hiroshi Umeda, Hisakazu KATSUUMI | 2018-10-09 |
| 10074958 | Laser system | Osamu Wakabayashi, Masaki Arakawa | 2018-09-11 |
| 10050403 | Excimer laser chamber device | Hisakazu KATSUUMI, Kazuya Takezawa, Hiroaki TSUSHIMA, Takeshi Asayama | 2018-08-14 |
| 9966721 | Laser system | Masaki Arakawa, Kouji Ashikawa, Yasuhiro KAMBA, Akiyoshi Suzuki, Osamu Wakabayashi | 2018-05-08 |
| 9877378 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-01-23 |