Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10117317 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2018-10-30 |
| 9954339 | Laser unit and extreme ultraviolet light generating system | Takashi Suganuma, Osamu Wakabayashi | 2018-04-24 |
| 9877378 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2018-01-23 |