Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10143074 | Filter and target supply apparatus | Tomohide Ichinose, Fumio Iwamoto, Tsukasa HORI, Hideo Hoshino | 2018-11-27 |
| 10136509 | Target supply device, processing device and processing method thefefor | Tsukasa HORI, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki | 2018-11-20 |
| 10073353 | Target supply device and EUV light generation apparatus | Hideki Shishiba | 2018-09-11 |
| 10028365 | Chamber device, target generation method, and extreme ultraviolet light generation system | Takanobu Ishihara, Tsukasa HORI, Takashi Saito | 2018-07-17 |
| 9894744 | Extreme ultraviolet light generation apparatus | Fumio Iwamoto, Tsukasa HORI, Takuya Ishii | 2018-02-13 |