Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10136509 | Target supply device, processing device and processing method thefefor | Tsukasa HORI, Yutaka Shiraishi, Shinya Ikesaka, Toshiro Umeki | 2018-11-20 |
| 10028365 | Chamber device, target generation method, and extreme ultraviolet light generation system | Tsukasa HORI, Takashi Saito, Yutaka Shiraishi | 2018-07-17 |