Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10028366 | Extreme UV light generation device and target recovery apparatus | Tsukasa HORI, Fumio Iwamoto | 2018-07-17 |
| 9961755 | Extreme ultraviolet light generation device | Hiroshi Umeda | 2018-05-01 |