Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9664999 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Chia-Jen Chen, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2017-05-30 |
| 9665007 | Rotary EUV collector | Shu-Hao Chang, Jui-Ching Wu, Tsung-Yu Chen, Tzu-Hsiang Chen, Ming-Chin Chien +2 more | 2017-05-30 |
| 9607833 | System and method for photomask particle detection | Shu-Hao Chang, Hsiang-Yu Chou, Kuo-Chang Kau, Shun-Der Wu, Chia-Chen Chen +1 more | 2017-03-28 |
| 9558944 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Jui-Ching Wu, Chia-Jen Chen, Chia-Ching Huang | 2017-01-31 |