Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9665007 | Rotary EUV collector | Shang-Chieh Chien, Shu-Hao Chang, Tsung-Yu Chen, Tzu-Hsiang Chen, Ming-Chin Chien +2 more | 2017-05-30 |
| 9558944 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Shang-Chieh Chien, Chia-Jen Chen, Chia-Ching Huang | 2017-01-31 |