Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9665007 | Rotary EUV collector | Shang-Chieh Chien, Shu-Hao Chang, Jui-Ching Wu, Tsung-Yu Chen, Ming-Chin Chien +2 more | 2017-05-30 |
| 9625824 | Extreme ultraviolet lithography collector contamination reduction | Yen-Cheng Lu, Jeng-Horng Chen, Shun-Der Wu | 2017-04-18 |