Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678431 | EUV lithography system and method with optimized throughput and stability | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2017-06-13 |
| 9625824 | Extreme ultraviolet lithography collector contamination reduction | Yen-Cheng Lu, Jeng-Horng Chen, Tzu-Hsiang Chen | 2017-04-18 |
| 9607833 | System and method for photomask particle detection | Shang-Chieh Chien, Shu-Hao Chang, Hsiang-Yu Chou, Kuo-Chang Kau, Chia-Chen Chen +1 more | 2017-03-28 |