Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607833 | System and method for photomask particle detection | Shang-Chieh Chien, Shu-Hao Chang, Hsiang-Yu Chou, Shun-Der Wu, Chia-Chen Chen +1 more | 2017-03-28 |
| 9570302 | Method of patterning a material layer | Shu-Hao Chang, Kevin Huang, Jeng-Horng Chen | 2017-02-14 |