Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735065 | Systems and methods of local focus error compensation for semiconductor processes | Chia-Hao Hsu, Pei-Cheng Hsu, Chih-Ming Chen, Chia-Chen Chen | 2017-08-15 |
| 9618856 | Method of overlay in extreme ultra-violet (EUV) lithography | Chia-Hao Hsu, Chia-Chen Chen | 2017-04-11 |
| 9558944 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Jui-Ching Wu, Shang-Chieh Chien, Chia-Jen Chen | 2017-01-31 |
| 9548209 | Method for integrated circuit fabrication | Ching-Fang Yu, Ting-Hao Hsu | 2017-01-17 |