Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735065 | Systems and methods of local focus error compensation for semiconductor processes | Pei-Cheng Hsu, Chia-Ching Huang, Chih-Ming Chen, Chia-Chen Chen | 2017-08-15 |
| 9664900 | Projection apparatus and projection method | Wen-Lung Lin, De-Jian Ou | 2017-05-30 |
| 9639467 | Environment-aware cache flushing mechanism | Fan-Lei Liao, Shun-Chih Yu | 2017-05-02 |
| 9618856 | Method of overlay in extreme ultra-violet (EUV) lithography | Chia-Ching Huang, Chia-Chen Chen | 2017-04-11 |
| 9588417 | Photomask pellicle | Chia-Chun Chung, Chih-Tsung Shih | 2017-03-07 |
| 9558944 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Chen Chen, Jui-Ching Wu, Shang-Chieh Chien, Chia-Jen Chen, Chia-Ching Huang | 2017-01-31 |