Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735065 | Systems and methods of local focus error compensation for semiconductor processes | Chia-Hao Hsu, Chia-Ching Huang, Chih-Ming Chen, Chia-Chen Chen | 2017-08-15 |
| 9535317 | Treating a capping layer of a mask | Chih-Cheng Lin, Ta-Cheng Lien, Wei-Shiuan Chen, Hsin-Chang Lee, Anthony Yen | 2017-01-03 |